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AWM42150VH

AWM42300V

 

AWM40000 系列氣體質(zhì)量流量傳感器， 非放大式 (mV)， 流量/壓力范圍：±30 SCCM; 接口類型：岐管。

The AWM40000 Series Airflow Sensors are based on proven microbridge technology and include both unamplified sensor-only devices and amplified signal conditioned devices.

 

微橋氣體質(zhì)量流量傳感器的工作原理是熱傳遞。氣體質(zhì)量流量經(jīng)引導(dǎo)流過傳感元件的表面。輸出電壓與流過封裝進(jìn)出口的空氣或其他氣體質(zhì)量成正比。

 

This sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin film, thermally-isolated bridge structure containing heater, and temperature sensing elements. 橋結(jié)構(gòu)能夠快速靈敏地響應(yīng)流過芯片的空氣或其他氣體氣流。中心加熱元件兩側(cè)的雙傳感元件還能指示氣流流過的方向和速率。

 

The specially-designed housing precisely directs and controls the airflow across the microstructure sensing element. 封裝的機(jī)械設(shè)計(jì)能夠輕松將其安裝在印刷電路板上。

 

Laser-trimmed, thick film and thin film resistors provide consistent interchangeability from one device to the next. 微橋氣體質(zhì)量流量傳感器利用包裹在氮化硅薄膜中的熱電阻。這些電阻呈懸浮狀態(tài)，在硅片的刻蝕腔上方形成兩座橋。

 

芯片置于精確規(guī)格的氣流通道，提供可重復(fù)的流量響應(yīng)。Highly effective, thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges.

 

微橋式氣體質(zhì)量流量傳感器的小尺寸和熱隔離功能實(shí)現(xiàn)對(duì)氣流的極速響應(yīng)及高靈敏度。Dual Wheatstone bridges control airflow measurement–one provides closed loop heater control, the other contains the dual sensing elements.

 

加熱器電路通過提供與質(zhì)量流量成正比的輸出，最大程度地降低環(huán)境溫度變化導(dǎo)致的輸出變化。The circuit keeps the heater temperature at a constant differential (160°C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. 裝置的輸出與電源電壓成比例，也與惠斯通電橋電路的差分電壓相對(duì)應(yīng)。

 

The unamplified versions require both a heater control circuit and a sensing bridge supply circuit for operation per specification. 這兩種電路不在傳感器電路板上，因此必須在應(yīng)用中提供。Differential amplifier circuitry may be useful in providing output gain and/or introducing voltage offsets to the sensor output. The amplified versions' onboard circuits may be used to increase output gain and introduce voltage offsets. (See product datasheet and installation instructions for further circuit information.)

 

 

精密硅微機(jī)械加工

對(duì) 0.1 SCCM 至 6 SLPM 的低流量敏感

適用于較高流量

Low power consumption allows for use in portable devices and battery-powered applications

模擬輸出

Standard 2,54 mm [0.10 in] mounting centers

激光修正達(dá)到可互換性

Accurate sensing of low pressure

 

 

加熱、通風(fēng)和空調(diào)系統(tǒng)的風(fēng)門控制

氣體分析儀

低真空控制

過程控制

醫(yī)用呼吸機(jī)和肺活量儀

制氧機(jī)

泄漏檢測(cè)儀

通氣罩

麻醉控制

氣體計(jì)量

氣相色譜儀